|
COMPexPro Features & Benefits |
|
Compact nanosecond UV power up to 30 W for high peak power and large area processes |
|
Excellent energy stability for reproduce able results |
|
Optimized tube and resonator design for low maintenance intervals and long gas life times |
|
Accessory for COMPexPro |
|
COMPex Pro 50 Unstable Resonator Optics 193, 248 nm |
|
COMPex Pro 100 Unstable Resonator Optics 193, 248, 308 nm |
|
COMPex Pro 200 Unstable Resonator Optics 193, 248, 308 nm |
|
Unstable Resonator Adapter (COMPexPro 50, 100, 200) |
|
Beam Aligner |
|
Temperature Stabilization Module |
|
Model Name |
Wavelength (nm) |
Max. Pulse Frequency (Hz) |
Max. Pulse Energy (mJ) |
Max. Power (W) |
|
COMPexPro 50 |
193 |
50 |
100 |
4 |
|
COMPexPro 102 |
20 |
200 |
4 |
|
|
COMPexPro 110 |
100 |
200 |
12 |
|
|
COMPexPro 201 |
10 |
400 |
4 |
|
|
COMPexPro 205 |
50 |
400 |
15 |
|
|
COMPexPro 50 |
248 |
50 |
150 |
7 |
|
COMPexPro 102 |
20 |
400 |
7 |
|
|
COMPexPro 110 |
100 |
400 |
30 |
|
|
COMPexPro 201 |
10 |
700 |
7 |
|
|
COMPexPro 205 |
50 |
700 |
30 |
|
|
COMPexPro 102 |
308 |
20 |
250 |
5 |
|
COMPexPro 110 |
100 |
250 |
16 |
|
|
COMPexPro 201 |
10 |
500 |
4 |
|
|
COMPexPro 205 |
50 |
500 |
20 |
|
|
COMPexPro 102 |
351 |
20 |
200 |
4 |
|
COMPexPro 110 |
100 |
200 |
12 |
|
|
COMPexPro 201 |
10 |
300 |
3 |
|
|
COMPexPro 205 |
50 |
300 |
15 |
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