The Agilent 1000 L/s turbo pump provides high pumping speeds from 790-1,050 L/s (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio and consequent low base pressure, high-throughput and high foreline pressure. It is designed to be oil-free and contamination-free, and to have very high reliability with the ability to operate in any position without materials stress.
Applications for this turbo pump include high energy physics and research, nanotechnologies, mass spectrometry, industrial vacuum processing, semiconductors and electron microscopy.
Pumping speed: |
ISO 160:
CFF 10” or ISO 200:
ISO 250:
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N2: 790 l/s
N2: 950 l/s
N2: 1,050 l/s
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He: 820 l/s
He: 870 l/s
He: 900 l/s
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H2: 860 l/s
H2: 900 l/s
H2: 920 l/s
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Compression ratio: | ISO 160 | N2: 1 x 109 | He: 1 x 107 | H2: 1 x 106 |
Base pressure* (with recommended forepump) | ||||
Inlet flange | ISO 160 ISO 200 | ISO 200-F bolted | CFF 10” | ISO 250 ISO 250-F bolted |
Foreline flange | KF 40 | |||
Rotational speed | 38,000 rpm | |||
Start-up time | ||||
Recommended forepump | Mechanical: Agilent DS 402 Dry scroll: Agilent TS300, IDP-15 | |||
Operating position | Any | |||
Cooling requirements | Forced air or water | |||
Bakeout temperature |
120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
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Vibration level (displacement) | < 0.01 μm at inlet flange | |||
Weight kg (lbs): |
ISO 160 flange
ISO 200 flange
CF 10” flange
ISO 250 flange
ISO 200-F and 250-F bolted flange, CF 10” flange
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19 (41.8)
19.4 (43.0)
25.5 (54.2)
21.2 (46.6)
25.5 (54.2)
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