The Agilent high throughput turbomolecular pump, Turbo-V 1K-G

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The Agilent high throughput turbomolecular pump, Turbo-V 1K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 1K-G the optimum pumping solution for the vacuum coating industry.

Features

Application-specific pumping solution designed for thin film deposition equipment
High Pumping speed and high gas throughput
Rugged design and highly efficient cooling system for continuous operation
Gas Purge for bearing protection
Rack type of Navigator on board controllers
Versatile electronics interface with easy-to-use control Software
Analog I/O signals and RS232 / RS485 interface as standard Agilent Profibus interface as option

Pumping speed: ISO 160: ISO 200:	Ar: 750 l/s Ar: 1,040 l/s	N2: 810 l/s N2: 1,080 l/s	He: 950 l/s/ He: 1,150 l/s	H2: 680 l/s H2: 730 l/s
Compression ratio:	Ar: 5 x 108	N2: 5 x 107	He: 4 x 104	H2 1.5 x 104
*Base pressure (with recommended forepump)**	-10 mbar
Inlet flange	ISO 160F, ISO 200F
Foreline flange ISO 160: ISO 200:	KF 25 NW KF 40 NW
Nominal rotational speed	45,500 rpm
Start-up time
Minimum recommended forepump	> 20 m3/h (TriScroll 600, DS 602)
Operating position	Any
Operating ambient temperature	+5 °C to +35 °C
Bakeout temperature	80 °C at inlet flange max. (ISO flange)
Vibration level(displacement)
Cooling requirements	Water
Power supply Input voltage: 100-240 Vac Max operating power:	< Input freq.: 50 - 60 Hz 400 W using Nitrogen and lighter gases (water cooling setting) 260 W using Argon (air cooling setting)	Max input power: 600 VA	Stand-by power: 30 to 35 W
Protection fuse(Navigator controller)	1 x 6.3 A
Serial communication(Navigator Kit)	RS232 cable with a 9-pin D type	male connector and a 9-pin D type female connector, and Navigator software (optional)
Storage temperature	-20 °C to +70 °C
Weight	26.8 kg (59.1 lbs)