Versatile Imaging Capability
Multi-Channel Imaging
Wide Variety of Observation Techniques
The specimen chamber and the vacuum system are optimized for:
Microanalysis
Image Resolution | Resolution SE | 0.8 nm@15 kV | |
---|---|---|---|
0.9 nm@1 kV | |||
Magnification | 20~2,000,000 x | ||
Electron Optics | Emitter | ZrO/W Schottky Emitter | |
Accelerating Voltage | 0.1~30 kV (0.01 kV step) | ||
Probe Current | Max. 200 nA | ||
Detectors | Standard Detectors | UD(Upper Detector) | |
MD(Middle Detector) | |||
LD(Lower Detector) | |||
Optional Detectors | PD-BSED(Semiconductor type) | ||
UVD (Ultra Variable Pressure Detector) | |||
Variable Pressure(VP) Mode (Option) | Pressure Range | 5~300 Pa | |
Available Detectors in VP mode | PD-BSED, UVD, UD, MD,LD | ||
Specimen Stage | Stage Control | 5-axis Motor Drive | |
Movable Range | X | 0~135 mm | |
Y | 0~100 mm | ||
Z | 1.5~40 mm | ||
T | -5~70° | ||
R | 360° | ||
Specimen Chamber | Specimen Size | Max. φ200 mm, Max. 80mm Height | |
Monitor(Option) | 23 inch LCD(1,920×1,080) , supports dual monitors operation | ||
Image Display Mode | Large Screen Display Mode | 1,280×960 pixels | |
Single Image Display Mode | 800×600 pixels | ||
Dual Image Display Mode | 800×600 pixels、1,280×960 pixels with dual monitors | ||
Quad Image Display Mode | 640×480 pixels | ||
Hex Image Display Mode w/dual monitors | 640×480 pixels with dual monitors | ||
Image Data Saving | Pixel Size | 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680 | |
Optional Accessories | Energy Dispersive X-ray Spectrometer (EDX) | ||
Wavelength Dispersive X-ray Spectrometer (WDX) | |||
Electron Backscattered Diffraction Detector (EBSD) | |||
Cathodoluminescence System (CL) | |||
Cryogenic Transfer System | |||
Compatible with various types of sub-stages |
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