Secondary electron resolution
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1.0 nm guaranteed (at accelerating voltage of 15 kV, working distance of 4 mm) 1.6 nm guaranteed (at accelerating voltage of 1 kV, working distance of 1.5 nm, in deceleration mode*1) 2.5 nm guaranteed (at accelerating voltage of 1 kV, working distance of 1.5 mm, in standard mode)
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Magnification
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Low magnification mode: 25 to 2,000x High magnification mode: 100 to 800,000x (The magnifications indicated above are based on the reference display size of 127 mm × 95.3 mm.)
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Electron Optics
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Electron gun
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ZrO/W Schottky emission
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Probe current
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≥100 nA guarenteed (at accelerating voltage of 30 kV)
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Accelerating voltage
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0.5 to 30 kV (in standard mode)
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Irradiation voltage
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0.1 to 2.0 kV (in deceleration mode)*1
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Lens system
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3-stage electromagnetic lens system
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Objective lens aperture
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Click-stop, 4 position heated aperture
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Stigmator coil
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octapole electromagnetic type (X, Y)
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Scanning coil
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2-stage electromagnetic deflection type
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Beam blanking
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Electromagnetic type (operated at the time of image capture)
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Specimen stage
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Stage movement
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5-axis motor drive
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Movable ranges
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X: 0 to 110 mm Y: 0 to 110 mm Z: 1.5 to 40 mm T: -5 to + 70 mm R: 350°
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Maximum allowable specimen size
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150 mmΦ (standard) 200 mmΦ (option)
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Image shift
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±20 µm (at working distance of 15 mm)
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Detectors
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Everhart Thornly Secondary Electron Detectors (upper and lower detectors)
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Display system
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PC/OS
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PC/AT-compatible OS: Windows XP Professional
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Monitor
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19-inch LCD monitor
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Image display modes
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Full-screen display: 1,280 × 1,024 pixels Reduced-size display: 640 × 480 pixels Reduced-size display for adjustment: 320 × 240 pixels Double-image simultaneous display: 640 × 480 pixels × 2 areas
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Scanning modes
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5 slow scan speeds TV and Fast scan mode Movable reduced area HR Capture mode Line scan mode Spot analysis mode Average concentration analysis mode Split-screen/dual-magnification mode
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Scanning rates
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TV scan
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Reduced display: 25/30*2 frames/s
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Fast scan
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Full-screen display: 6.25/7.5 frames/s
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Slow scan
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Full-screen display: 1/4/20/40/80 s/frame Reduced-size display: 0.5/2/10/20/40 s/frame
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Image data saving
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640 × 480 pixels, 1,280 × 960 pixels, 2,560 × 1,920 pixels, 5,120 × 3,840 pixels
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Image data printout
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Report generation function included
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Saved image data management
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SEM Data Manager (image database/image processing function) included Image data management Thumbnail display Various image processing function
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External device connection
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USB interface Network interface (Ethernet*3)
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Other functions
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Beam blanking (at the time of image freezing) Raster rotation/tilt compensation/dynamic focus CD measurement function (on displayed image/on saved image, each optionally available) Alphanumetric and standard measurement function Data bar (image numbar, accelerating voltage, magnification, micron bar, micron value, WD value, data/time) Data input (drawing figure/character input)
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Evacuation system
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Automatic evacuation system
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Full-auto pneumatic valve method
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Ultimate vacuum
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Electron gun chamber: -7Pa Specimen chamber: -4Pa
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Vacuum pump
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Ion pump, 40 L/s, ×2 Magnetic-bearing-type turbo-molecular pump, 300 L/s, ×1 Oil rotary pump, 135 L/min (162 L/min)*2, ×2
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Vacuum gauge
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Penning vacuum gauge, Pirani vacuum gauge ×2
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Contamination removal
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Anti-contamination trap
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