| Secondary Electron Image Resolution | 1.0 nm (Vacc 15 kV, WD=4 mm)*1 | ||
| 1.3 nm (landing voltage 1kV, WD=1.5 mm)*1 | |||
| Mag | Low mag mode | 20-2,000x (Magnification on Photo)*2 | |
| 80-5,000x (Magnification on display)*3 | |||
| High mag mode | 100-800,000x (Magnification on Photo)*2 | ||
| 400-2,000,000x (Magnification on display)*2 | |||
| Electron Optics | Electron gun | Cold cathode field emission source | |
| Accelerating voltage | 0.5 kV to 30 kV (Standard mode) | ||
| Landing voltage | 0.1 kV to 2.0 kV (Deceleration mode) | ||
| Objective lens aperture | Objective aperture (Heating type), 4 openings, selectable from outside of vacuum | ||
| Electrical Image Shift | ±12 µm (WD=8 mm) | ||
| Specime Stage | Stage Control | 3-axis motor drive | |
| 5-axis motor drive*4 | |||
| Traverse range | X | 0-50 mm | |
| Y | 0-50 mm | ||
| R | 360° | ||
| T | -5-70° | ||
| Z | 1.5-30 mm | ||
| Max. sample size | 100 mm (Maximum) | ||
| 150 mm dia.*4 | |||
| Detector | Secondary electron detector | Lower/Upper | |
| SE/BSE Signal Mixing Function (Upper detector) | |||
| Backscattered Electron Detector | Semiconductor type BSED*4 | ||
| YAG BSED*4 | |||
| Transmission Electron Detector | STEM detector (for BF-STEM)*4 | ||
| BF-STEM aperture*4 | |||
| DF-STEM holder*4 | |||
| Other | Energy dispersive X-ray spectrometer*4 | ||
| Faraday cup*4 | |||
| EBIC image observation unit*4 | |||
Hiện tại chưa có ý kiến đánh giá nào về sản phẩm. Hãy là người đầu tiên chia sẻ cảm nhận của bạn.