Secondary Electron Image Resolution | 1.0 nm (Vacc 15 kV, WD=4 mm)*1 | ||
1.3 nm (landing voltage 1kV, WD=1.5 mm)*1 | |||
Mag | Low mag mode | 20-2,000x (Magnification on Photo)*2 | |
80-5,000x (Magnification on display)*3 | |||
High mag mode | 100-800,000x (Magnification on Photo)*2 | ||
400-2,000,000x (Magnification on display)*2 | |||
Electron Optics | Electron gun | Cold cathode field emission source | |
Accelerating voltage | 0.5 kV to 30 kV (Standard mode) | ||
Landing voltage | 0.1 kV to 2.0 kV (Deceleration mode) | ||
Objective lens aperture | Objective aperture (Heating type), 4 openings, selectable from outside of vacuum | ||
Electrical Image Shift | ±12 µm (WD=8 mm) | ||
Specime Stage | Stage Control | 3-axis motor drive | |
5-axis motor drive*4 | |||
Traverse range | X | 0-50 mm | |
Y | 0-50 mm | ||
R | 360° | ||
T | -5-70° | ||
Z | 1.5-30 mm | ||
Max. sample size | 100 mm (Maximum) | ||
150 mm dia.*4 | |||
Detector | Secondary electron detector | Lower/Upper | |
SE/BSE Signal Mixing Function (Upper detector) | |||
Backscattered Electron Detector | Semiconductor type BSED*4 | ||
YAG BSED*4 | |||
Transmission Electron Detector | STEM detector (for BF-STEM)*4 | ||
BF-STEM aperture*4 | |||
DF-STEM holder*4 | |||
Other | Energy dispersive X-ray spectrometer*4 | ||
Faraday cup*4 | |||
EBIC image observation unit*4 |
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