The Agilent high throughput turbomolecular pump, Turbo-V 2K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 2K-G the optimum pumping solution for the vacuum coating industry.
Pumping speed: |
N2: 1600 l/s
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Compression ratio: | N2: 3 x 105 | |
Base pressure* (with recommended forepump) | -8 mbar | |
Inlet flange | ISO 250F | |
Foreline flange | KF 40 NW | |
Nominal rotational speed | 33,000 rpm | |
Start-up time | ||
Recommended forepump | > 40 m3 /h | |
Operating position | Any | |
Operating ambient temperature | +5 °C to +40 °C | |
Power supply Input voltage Input freq. |
100 - 240 Vac 50 - 60 Hz |
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Communication interface | Analogue I/O RS232 / RS485 Profibus |
Standard Standard Optional |
Dimensions |
Height
Weight Diameter |
335 mm (13.18 in.)
335 mm (13.18 in.) 35 kg (77 lbs) |
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