The Agilent 300 L/s turbo pump, TwisTorr 304 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 300 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.
This 300 L/s turbomolecular pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.
The TwisTorr 304 FS is available with onboard or rack controllers.
Pumping speed: With CFF 6” or ISO 100: With CFF 8” or ISO 160: |
N2: 250 l/s
N2: 250 l/s
|
He: 255 l/s/
He: 255 l/s
|
H2: 220 l/s
H2: 220 l/s
|
Ar: 250 l/s
Ar: 250 l/s
|
Gas throughput at full rotational speed (with recommended forepump) Ambient Temp (25 °C) Water Temp (25 °C, 50 l/h) |
N2: 170 sccm N2: 170 sccm |
Ar: 110 sccm Ar: 110 sccm |
||
Compression ratio & Foreline tolerance: | N2:>1 x 1011 N2:>10 mbar |
He: > 1 x 108 H2: >10 mbar |
H2: 1.5 x 106 H2: >4 mbar |
Ar: >1 x 1011 Ar: >10 mbar |
Base pressure* (with recommended forepump) (5 m3/h) | ||||
Inlet flange | CFF" 8 O.D. CFF" 2 6 O.D. |
ISO 160 ISO 100 |
||
Foreline flange | KF 16 NW (KF25 - optional) | |||
Rotational speed | 60000 rpm (1010 Hz driving frequency) | |||
Start-up time | ||||
Recommended forepump | Mechanical: Agilent DS 102 Dry pump: Agilent SH 110 |
|||
Operating position | Any | |||
Operating ambient temperature | +5 °C to +35 °C | |||
Relative humidity of air | 0 - 90 % (not condensing) | |||
Bakeout temperature | 120 °C at inlet flange max. (CFF flange) 80 °C at inlet flange max. (ISO flange) | |||
Lubricant | Permanent lubrication | |||
Cooling requirements | Forced air (5- 35 °C ambient temperature) Water (mandatory if ambient temperature > 35 °C) |
|||
Coolant water | Minimum flow: 50 l/h (0.89 GPM)) |
Temperature: +15 °C to +30 °C |
Pressure: 3 to 5 bar (45 to 75 psi) |
|
Noise pressure level | < 50 dB(A) at 1 meter | |||
Storage temperature | -40 °C to +70 °C | |||
Max altitude | 3000 m | |||
Weight kg (lbs): |
Pump ISO 100:
5.5 (12.3) |
Pump CFF 6”:
7.5 kg (16.5) |
Pump ISO 160:
5.7 kg (12.6) |
Pump CFF 8”:
9.7 kg (20.9) |
Hiện tại chưa có ý kiến đánh giá nào về sản phẩm. Hãy là người đầu tiên chia sẻ cảm nhận của bạn.