1. XVison series is equipped with three detectors | ||
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2. Variety of coordinate linkage function (optional) | ||
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3. Multi-Gas Injection System (MGS II) (Optional) | ||
Variety of gasses can be injected such as for passivation, wiring, insulator, and enhanced etching etc. | ||
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4. Vacuum Transfer function (Optional) | ||
Sample on the Vacuum Transfer System in the glove box can be transfered to the XVision200 without breaking vacuum. The processed sample in the XVision can be returned to the glove box without breaking vacuum. |
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