Items

Description

Import function

Automatic select and read function of four elements image data(Equipped with automatic SEM condition acquisition function)

Measurement performance

Depth accuracy ± 20%(Reference)
Measurement performance is different depending on calibration accuracy, the condition of the kind of the specimen, the observation mode, and the observation condition.
Detectable angle range: ±50 (Reference)
(Observation condition: Standard mode)
Unavailable in the combination of "Charge-up reduction mode" and "5 kV mode".

Measurement function

Section profile display
Calibration function (X/Y, Z and Flat)
Distance of X and Y, length and angle measurement between two points specified on the image
Surface area measurement
Distance of X and Y, length and angle measurement between two points specified on section profile
Surface roughness measurement on section profile
Depth direction zoom-in function in section profile display
Base line correction function (straight line and curved line)
Bird's-eye view display
Color contour line display

Three-dimensional display function

Rotation and zoom-in Animation record function of observation screen (AVI file)

PC OS

Windows® 7 Professional