A maximum of twelve 3mm grids can be fitted to the STEM grid holder, allowing multiple specimen analysis. A dedicated retractable arm complete with Deben Gen5 electronics allows the STEM Detector to be used with any SEM (suitable free chamber port and AUX video input required) . The 12 position grid holder is airlock compatible and is supplied complete with stage dovetail/sledge as required.
The STEM detector assembly uses a single Bright Field and 4 element Dark Field diode. Such is the performance of this design that it has proved equally successful fitted to both FEG and Tugsten SEMs. The STEM detector assembly inserts below the grid holder and has X,Y, Z position adjustment.
Deben Gen5 electronics is configured with three input channels and a single video output channel (optional two or three simultaneous video outputs).
The unrivalled scope of adjustability available to the operator then permits highly optimised images to be taken.
● Single bright field and four element dark field diode
Optional Motorised insertion:
Both Gen5 BSD and STEM detector arms can be optionally specified with motorised retraction. The motorised arm provides three positions,
inserted, park (semi-retracted), as well as fully retracted. Alignment of the detector positions is normally better than 20um.
Control is via software or optional keypad, motorisation is particularly useful when the detector is mounted in an inconvenient position
such as to the rear of the column, or when used in a hazardous environment such as a ”hot cell”.
A Metal bellows sealed version is also available for high vacuum or high temperature applications .
| Remote Retraction of BSD and STEM detectors |
| Precision Detector Alignment, <20um |
| Three Positions |
| Simple computer control |
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