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X-ray fluorescence (XRF) measuring instrument with a polycapillary x-ray optics for automated measurements and analyses of coating thicknesses and compositions on very small components and structures
Depending on the X-ray optics, structures with a size of 100 μm or less can be analysed
Very high intensities and thus good precision
Even for thin coatings, measurement uncertainty < 1 nm possible
Standard model only for even or almost even surfaces
Model LD (Long Distance) suitable for measurements with more than 10 mm distance, e.g. for assembled circuit boards or plug contacts with complicated geometry
Large and spacious measurement chamber with a cutout (C-slot)
Automated series testing with fast, programmable XY-stage
Typical fields of application
Measurement of coating systems on PC Boards, leadframes and wafers
Measurement of coating systems on small components and thin wires
Materials analysis on small structures and small components
