Ultra-high Resolution Scanning Electron Microscope Regulus Series

State: In stock

As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform.

With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/8240 models and 1.1 nm in the Regulus8100 model—an improvement of roughly 20% in resolution at 1 kV landing voltage compared with previous models.

The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.

User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.

*1 Only in Regulus8220/8230/8240

Warranty: No warranty infomation

Price: Contact us

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03 months of free warranty for consumable and accessories
12 months of free warranty for main equipment
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Features
Specifications
Comments

Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
Resolution improved by 20% than previous models
(Regulus8220/8230/8240: 0.9 nm/1 kV; Regulus8100: 1.1 nm/1 kV)
Maximum magnification doubled from 1 million times to 2 million times*2
User-support functions to ensure high performance

HR & ULV Imaging

HR & ULV Imaging
Specimen: Gold particle on Carbon
Landing voltage: 10 V

UHR imaging

UHR imaging
Specimen: Catalyst
Accelerating voltage: 30 kV

HR & LV EDX analysis

HR & LV EDX analysis
Specimen: Tin ball
Landing voltage: 1.5 kV

*2: Only in Regulus8220/8230/8240

			Regulus 8100	Regulus 8220	Regulus 8230	Regulus 8240
Secondary Electron Resolution			0.8 nm (Vacc: 15 kV) 1.1 nm (Landing voltage: 1 kV)^*3	0.7 nm (Vacc: 15 kV) 0.9 nm (Landing voltage: 1 kV)^*3
Accelerating voltage			0.5~30 kV	0.5~30 kV
Landing voltage^*3			0.1~2 kV	0.01~20 kV
Mag.			20~1,000,000 ×^*4
Specimen stage	Stage control		3-axis motor drive^*5	5-axis motor drive
	Movable range	X	0~50 mm	0~50 mm	0~110 mm	0~110 mm
		Y	0~50 mm	0~50 mm	0~110 mm	0~80 mm
		R	360°
		T	-5~70°
		Z	1.5~30 mm		1.5~40 mm
	Stage repeatability		-	-	-	Less than ±0.5 µm