Pressure Range | Atmosphere to 1 x 10-8 mbar (7.5 x 10-9 Torr) | |||||||||
Leak Rate | < 1 x 10-9 std cc/sec He | |||||||||
Service Life (bellows) | 1.5 million cycles (minimum) | |||||||||
Mounting Position | Any | |||||||||
Baking Temperature | Valve open | Valve closed | Position indicator (A/O optional) | Solenoid (A/O optional) | ||||||
200°C (392°F) | 150°C (302°F) | 70°C (158°F) | 60°C (140°F) | |||||||
Conductance | 3/4 in. Angle | 3/4 in. In-line | 1 in. Angle | 1 in. In-line | 1½ in. Angle | 1½ in. In-line | ||||
6 l/sec | 5 l/sec
|
15 l/sec | 13 l/sec | 48 l/sec | 44 l/sec | |||||
Materials | Valve body | Bellows | Bellows flange | Seal plate | Bonnet gasket | O-rings | ||||
304L SS | AM-350 | 304 SS | 304 SS | Viton (V747) | Viton (V747) | |||||
Pneumatic Valves | ||||||||||
Air Connection | 1/8 in. NPT | |||||||||
Air Pressure | 60 psig (minimum) | 80 psig (maximum) | ||||||||
Open/Close Time | 3/4 in. Valves | 1 in. Valves | 1 ½ in. Valves | |||||||
Solenoid (Optional) Supply Voltages: | 110/120 V,50/60 Hz 220/240 V, 50/60 Hz 24 VDC | |||||||||
Air Cylinder Volume | 3/4 in. Valves | 1 in. Valves | 1 ½ in. Valves | |||||||
0.049 L | 0.049 L | 0.1 L | ||||||||
Valve Position | No mechanical indicator (see optional position indicator) | |||||||||
Position Indicator (Optional) | Voltage | Current | Power | Visual Indicator | ||||||
5-240VDC/AC | 100 mA (maximum) | 10 W (maximum) | Green LED | |||||||
Switching Logic | SPST normally open |
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