VarioLas Family

State: In stock

Affordable tools for high quality UV microprocessing. VarioLas UV material processing systems based on the COMPexPro 100 Excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each of the VarioLas systems, which are available for the common excimer laser wavelengths 193 nm, 248 nm and 308 nm.

Warranty: No warranty infomation

Price: Contact us

Order

Delivery time: 8h00 - 18h00 daily
Genuine product, provided width CO, CQ
03 months of free warranty for consumable and accessories
12 months of free warranty for main equipment
Accessorie's price is applied only when purchased with
main equipment
Contact us for any particular accessory's quotion

Email: info@redstarvietnam.com Every day in week

Features
Specifications
Downloads
Comments

The VarioLas Eco, VarioLas Pro and VarioLas Sweep are available for the common excimer laser wavelengths of 193 nm, 248 nm and 308 nm.

VarioLas Key Features

Coherent Excimer Laser Inside

Large Field Size for Parallel Processing

Line Beam Availability

Superior Pulse-to-Pulse Stability

Unmatched Processing Stability

Modular Concept with Upgrading Options

VarioLas Model	VarioLas Eco	VarioLas Pro	VarioLas Sweep
Field Geometry	Square	Square	Line
Substrate Field Size (mm²)	2 x 2	2 x 2	50 x 0.6
Optical Resolution (μm)	30	5	-
Working Distance (mm)	50	50	100
Max. Repetition Rate (Hz)	100	100	100
Max. Energy Density (mJ/cm²) at 193 nm	1000	1000	230
Max. Energy Density (mJ/cm²) at 248 nm	3500	3500	600
Max. Energy Density (mJ/cm²) at 308 nm	3000	3000	500
Energy Stability (%, 1 sigma) at 193 nm	2	2	2
Energy Stability (%, 1 sigma) at 248 nm	1	1	1
Energy Stability (%, 1 sigma) at 308 nm	1	1	1

Accessories

Part Number	Safety Options
1161813	Class 1 Housing
1161812	Automated Safety Class 3 Interlock Circuit
1107556	Automated Beam Shutter for 193 nm
1107557	Automated Beam Shutter for 248 nm
1157558	Automated Beam Shutter for 308 nm
Part Number	Control Options
1161814	Control PC (with monitor)
1161815	Substrate Stage (3 axes incl. substrate chuck)
1161816	Observation Unit (for VarioLasPro, 193 nm)
1161817	Observation Unit (for VarioLasPro, 248 nm and 308 nm)
1161818	Observation Unit (for VarioLasPro, all wavelengths)
1161819	Motorized Attenuator (upgrade)
1161820	Motorized Attenuator, Energy Control, Pro/Eco, 193 nm
1161821	Motorized Attenuator, Energy Control, Pro/Eco, 248 nm
1161822	Motorized Attenuator, Energy Control, Pro/Eco, 308 nm