■ For Performance Improvement of Ultra Precision Equipments as of Semiconductor Production FacilitiesBest suitable for Measurements of Micro Tremor of the ground or bridges, Vibration of Floor, Evaluations of Vibration Isolation Effects.
Category |
Functions |
Descriptions |
Details |
Amplifier |
Measurement Channel |
Vibration Input ×6 (CH1 ~ CH6) Voltage Input ×2 (CH7 ~ CH8) |
Voltage Inputs from Servo type Accelerometer (Single Axis type, 3 Axis type), Noise Level meter, Pressure meter, Thermo meter, |
Input Combination |
CH1 ~ CH6 AC/DC CH7 ~ CH8 DC |
CH1 ~ CH6 AC: 0.1Hz ~DC, :Zero Adjustment・Gravity Acceleration Cancellation DC only CH7 ~ CH8 DC only |
|
Frequency Response |
CH1~CH6 0.1Hz/DC~12Hz(±0.5dB) 0.1Hz/DC~30Hz(±0.5dB) 0.1Hz/DC~60Hz(±0.5dB) CH7~CH8 DC~12Hz(±0.5dB) DC~50Hz(±0.5dB) |
CH1 ~ CH6 Variable Low-pass filter to be set as fc=20Hz. 50Hz. 100Hz CH7 ~ CH8 Low-pass filter to be set on or off of fc=20KHz |
|
Measurement Range |
CH1 ~ CH6 0.01m/s2・0.1m/s2・1m/s2・ 10m/s2 CH7 ~ CH8 ±5V Full Scale Voltage Signal |
― |
|
Output Signal |
±5V Full Scale Voltage Waveform Signal |
2 Signal Routes (for Recorder, for Waveform Data Acquisition, Analysis) |
|
Linearity |
±0.5% Full Scale |
― |
|
Inter Range Error |
±2% |
― |
|
S / N Ratio |
60dB~100dB or more |
>100dB(Measurement Range:10m/s2) |
|
>96dB(Measurement Range:1m/s2) |
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>80dB(Measurement Range:0.1m/s2) |
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>60dB(Measurement Range:0.01m/s2) |
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Calibration Signal Output |
12Hz Full Scale equivalent |
Calibrated for 0.01m/s2 Range |
|
External Control |
Measurement Range Low-pass Filter |
Controlled by TTL level Signal |
|
Power |
9 ~12VDC, 2A |
― |
|
Power Consumption |
4W |
Increases by(0.8×Axis Number) watts connected with Pickups |
|
Ambient Environment |
0~+50℃ |
― |
|
Outer Size |
240(W) x 150(D) x 35(H) mm |
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|
Mass |
Approx 920g |
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Option
Category |
Function |
Content |
Details |
Hardware |
Output cable |
Mini plug - BNC 1.5m |
― |
Battery pack |
Continuous Operation : ≧3hrs. for 6ch Measurement |
Battery for Lap top |
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