Item | Description | |
---|---|---|
Electron source | W(310) cold field emission electron source | |
Accelerating voltage | 200 kV, 60 kV*1 | |
Imaging resolution | STEM | 0.078 nm(ADF-STEM image) |
TEM | 0.102 nm(lattice image) | |
Magnification | STEM | ×20~×8,000,000 |
TEM | ×100~×1,500,000 | |
Specimen stage | Specimen stage | Eucentric goniometer 5-axis stage |
Specimen size | 3 mm Φ | |
Specimen traverse | X, Y=±1.0 mm, Z=±0.4 mm | |
Specimen tilt | α=±25°, β=±35°(Hitachi double-tilt specimen holder*1) | |
Aberration corrector | Hitachi in-house probe-forming spherical aberration corrector (standard equipment) | |
Image display | PC & OS | Windows® 7 *2 |
Monitor | 27-inch wide LCD panel (for standard monitor and 2nd monitor*1) | |
Camera | Standard retractable camera Screen camera*1 (for viewing fluorescent screen) |
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