User-friendly operation
Windows® compatible GUI design. High specimen throughput, 1 minute for specimen exchange and 5 minutes for voltage
ramp up (300 kV) and beam on.
Stable high resolution microscopy
Point-to-point resolution of 0.18nm and lattice resolution of 0.1nm. A stable 5-axis eucentric goniometer stage.
Excellent performance reliability
Field-proven 10-stage accelerator gun design. High voltage resistor cable design.
Valuable optional accessories
Compatible specimen holder for use with Hitachi TEM, FIB and STEM systems.
A variety of specimen holders that provide heating, cooling and gas-injection capabilities for atomic resolution dynamic studies.
Note:Images on the FPD (flat panel display) are simulated.
Resolution |
0.10 nm (lattice) |
|
Accelerating voltage |
300 kV, 200 kV*1, 100 kV*1 |
|
Magnification |
Zoom mode |
1,000 - 1,500,000× |
SA mode |
4,000 - 500,000× |
|
Low mag mode |
200 - 500× |
|
Erectron gun |
Filament |
LaB6 (DC heating) |
Filament exchange |
Automated gun lift |
|
High voltage cable |
Resistor cable |
|
Illumination system |
Lens |
4-stage lens system |
Condenser aperture |
Click-stop 4-openings |
|
Probe size |
Micro mode: 0.05 - 0.2 µm (4 steps) |
|
Beam tilt |
±3° |
|
Imaging system |
Lens |
5-stage lens system |
Focusing |
Image wobbler |
|
Objective aperture |
Click-stop 4-openings |
|
Selected area aperture |
Click-stop 4-openings |
|
Erectron diffraction |
|
Selected-area electron diffraction |
Camera length |
250 - 3,000 mm |
|
Specimen chamber |
Specimen stage |
Eucentric 5-axis Hiper goniometer stage |
Specimen size |
3 mmΦ |
|
Stage translation |
X/Y = ±1 mm, Z = ±0.3 mm |
|
Specimen position display |
Auto-drive, Auto-trace |
|
Specimen tilt |
α = ±15°, β = ±15° |
|
Anti-contamination |
Cold block |
|
Baking function |
Mild baking function |
|
Viewing chamber |
Fluorescent screen |
Main screen: 110 mmΦ |
Optical viewer |
7.5× |
|
Camera chamber |
Field selection |
Full/half exposure |
Film |
25 sheets (2 sets of film magazines) |
|
GUI |
|
OS: Windows XP® |
Monitor |
19 inch monitor |
|
Functions |
Database, measurement, image processing |
|
Digital CCD camera*3 |
Camera coupling |
Lens coupling |
Effective pixels |
1,024 × 1,024 pixels |
|
A/D resolution |
12 bits |
|
Vacuum system |
Electron gun |
Ion pump: 60 L/s |
Column |
TMP: 260 L/s |
|
Viewing/camera chamber |
Diffusion pump: 280 L/s |
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