|
LineBeam Key Features |
|
Excellent Beam Profile Homogeneity |
|
Outstanding Optics Lifetime |
|
Display Industry Proven Technology; Large Installation Base Worldwide |
|
Standard Technology for Silicon Annealing Process (LTPS-LCD, OLED) |
|
Accessories for LineBeam |
|
Micro Smoothing Device |
|
Short Axis Fine Tuner |
|
Beam Profiler |
|
Pulse Expander Module |
|
Beam Stabilization Unit |
|
Beam Symmetry Generator |
|
Short Axis Online Monitor |
|
CB E-Sigma Monitor |
|
P-Lens Entrance Monitor |
|
SB E-Sigma Monitor |
|
LineBeam Model |
LineBeam 465 |
LineBeam 750 |
LineBeam 1000 |
LineBeam 1300 |
|
Wavelength (nm) |
308 |
308 |
308 |
308 |
|
Laser Pulse Energy (mJ) |
1050 |
2000 |
4000 |
4000 |
|
Max. Repetition Rate (Hz) |
600 |
600 |
600 |
600 |
|
Energy Density (mJ/cm2) |
350 |
430 |
435 |
435 |
|
Line Beam Length (mm) |
465 |
750 |
1000 |
1300 |
|
Line Beam Width (µm) |
350 |
400 |
580 |
450 |
|
Long Axis Homogeneity (%, 2 sigma) |
1.8 |
1.8 |
1.8 |
1.8 |
|
Short Axis Steepness (µm) |
125 |
125 |
125 |
125 |
|
Depth of Focus (µm) |
±150 |
±150 |
±120 |
±120 |
|
UV Processing Solutions |
Wavelength (nm) |
Beam Geometry |
Approx. Beam Dimensions |
Approx. Energy Density |
Laser Options |
|
UVblade |
308 |
Line |
(250-750 mm) x 0.3 mm |
0.3 J/cm2 |
LEAP, LAMBDA SX |
|
LineBeam |
308 |
Line |
(750 - 1300 mm) x 0.4 mm |
0.4J/cm2 |
VYPER, TwinVYPER |
|
VarioLas |
193, 248, 308 |
Line or Rectangular |
50 mm x 0.6 mm or 2 mm x 2 mm |
0.2-5 J/cm2 |
COMPexPro, LPXpro |
|
GeoLasPro |
193 |
Round Spot |
4-160 µm |
1-45 J/cm2 |
COMPexPro |
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