Agilent is pleased to offer Series 26 Aluminum Block Valves in partnership with VAT. Series 26 are compact, reliable valves used in rough to high vacuum applications for semiconductor and instrument manufacturing, R&D, and industrial vacuum systems. These block valves will reliably achieve 3 million cycles before first service in most applications. These valves are available in right-angle and in-line versions, and can be manually operated and pneumatically-operated. The pneumatic valve is also available with a position indicator. The position indicator delivers an electrical output signal when the valve cycles, and is user-set in either the normally-open or normally-closed position.
| Cycles until first service | with manual actuator | 10 000 |
| with closing spring (air-operated) | 3 million | |
| Maximum temperature | Valve body | ≤ 150 °C |
| Manual and pneumatic actuator | ≤ 120 °C | |
| Solenoid valve, position indicator | ≤ 80 °C | |
| Material | Valve body | aluminum EN AW-6060 (3.3206) |
| Plate | AISI 316L (1.4404, 1.4435) | |
| Bellows | AISI 316L (1.4404, 1.4435), AISI 316 Ti (1.4571) | |
| Seal: bonnet, plate | FKM (Viton) | |
| >Mounting orientation | any | |
| Solenoid valve | 24 V DC, 115 VAC, 220 VAC | |
| >Position indicator: contact rating | Voltage | 5 – 50 V AC / DC |
| Current | 5 – 100 mA | |
| >Valve position indication | visual (mechanical) | |
| Leak rate: valve body, valve seat | < 1 · 10 -9 mbar Is-1 | |
| >Pressure range (bellows) | 1 · 10-8 mbar to 5 bar (abs) | |
| Differential pressure on the plate | In opening direction | ≤ 2.0 bar |
| In closing direction | ≤ 5.0 bar | |
| Differential pressure at opening | ≤ 1 bar |
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