● LCD touch panel makes it easy to set the processing conditions.
● Thick or large specimens can be processed(Option).
● Recipe functions to store commonly used processing conditions.
|
Item |
Description |
|
|
Discharge |
Type |
Diode discharge magnetron type (electric field perpendicular to magnetic field) |
|
Electrode form |
Opposed parallel disk (magnet embedded) |
|
|
Voltage |
0.4 kV DC max. (variable through phase control) |
|
|
Current |
40 mA DC max. |
|
|
Coating rate (max.)*1*2 |
Pt target(option) |
15 nm/min |
|
Pt-Pd target (option) |
20 nm/min |
|
|
Au target (option) |
35 nm/min |
|
|
Au-Pd target (option) |
25 nm/min |
|
|
Specimen |
Max. diameter |
Φ60 mm |
|
Max. height |
20 mm |
|
|
Rotary pump |
135/162 l/min (50/60Hz) |
|
|
Target*2 |
Pt , Pt-Pd (8:2) , Au , Au-Pd (6:4) |
|
|
Power supply requirements |
Single phase, 100 V AC (±10%) 15A (50/60Hz), 3-Pin plug code(3 m) |
|
|
Dimensions |
Width |
450 mm |
|
Depth |
391 mm |
|
|
Height |
390 mm |
|
|
Weight |
Main unit : Approx. 25 kg |
|
*1:Coating rate is reference only.
*2:Target is not included in the main body. Please choose from the options.(Pt, Pt-Pd, Au, Au-Pd).
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