The VarioLas Eco, VarioLas Pro and VarioLas Sweep are available for the common excimer laser wavelengths of 193 nm, 248 nm and 308 nm.
|
VarioLas Key Features |
|
Coherent Excimer Laser Inside |
|
Large Field Size for Parallel Processing |
|
Line Beam Availability |
|
Superior Pulse-to-Pulse Stability |
|
Unmatched Processing Stability |
|
Modular Concept with Upgrading Options |
|
VarioLas Model |
VarioLas Eco |
VarioLas Pro |
VarioLas Sweep |
|
Field Geometry |
Square |
Square |
Line |
|
Substrate Field Size (mm2) |
2 x 2 |
2 x 2 |
50 x 0.6 |
|
Optical Resolution (μm) |
30 |
5 |
- |
|
Working Distance (mm) |
50 |
50 |
100 |
|
Max. Repetition Rate (Hz) |
100 |
100 |
100 |
|
Max. Energy Density (mJ/cm2) at 193 nm |
1000 |
1000 |
230 |
|
Max. Energy Density (mJ/cm2) at 248 nm |
3500 |
3500 |
600 |
|
Max. Energy Density (mJ/cm2) at 308 nm |
3000 |
3000 |
500 |
|
Energy Stability (%, 1 sigma) at 193 nm |
2 |
2 |
2 |
|
Energy Stability (%, 1 sigma) at 248 nm |
1 |
1 |
1 |
|
Energy Stability (%, 1 sigma) at 308 nm |
1 |
1 |
1 |
Accessories
|
Part Number |
Safety Options |
|
1161813 |
Class 1 Housing |
|
1161812 |
Automated Safety Class 3 Interlock Circuit |
|
1107556 |
Automated Beam Shutter for 193 nm |
|
1107557 |
Automated Beam Shutter for 248 nm |
|
1157558 |
Automated Beam Shutter for 308 nm |
|
Part Number |
Control Options |
|
1161814 |
Control PC (with monitor) |
|
1161815 |
Substrate Stage (3 axes incl. substrate chuck) |
|
1161816 |
Observation Unit (for VarioLasPro, 193 nm) |
|
1161817 |
Observation Unit (for VarioLasPro, 248 nm and 308 nm) |
|
1161818 |
Observation Unit (for VarioLasPro, all wavelengths) |
|
1161819 |
Motorized Attenuator (upgrade) |
|
1161820 |
Motorized Attenuator, Energy Control, Pro/Eco, 193 nm |
|
1161821 |
Motorized Attenuator, Energy Control, Pro/Eco, 248 nm |
|
1161822 |
Motorized Attenuator, Energy Control, Pro/Eco, 308 nm |
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