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MDA-80FA
Red Star Vietnam Co., Ltd.
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MDA-80FA

MDA-80FA

State: In stock
Easy operation UI
PC Operation with PLC control
Image grab & Data log
Warranty: No warranty infomation


Price: Contact us




Order
  • Delivery time: 8h00 - 18h00 daily
  • Genuine product, provided width CO, CQ
  • 03 months of free warranty for consumable and accessories
  • 12 months of free warranty for main equipment
  • Accessorie's price is applied only when purchased with
    main equipment
  • Contact us for any particular accessory's quotion
Email: info@redstarvietnam.com Every day in week

 

  • Easy operation UI
  • PC Operation with PLC control
  • Image grab & Data log
  • More than 100 Program recipes
  • Microscope position control system
  • Auto Align mark searching function

 

Type Full automatic (Mask Aligner)
Mask size up to 9" x 9"
Substrate size 8"
UV lamp & Power 2kW & power supply
Uniform beam size 10.25" x 10.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Pre-aligner ±50um
Frame Anti-Vibration system
Options UV Intensity meter
etc.
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