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MDA-150 (M)
Red Star Vietnam Co., Ltd.
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MDA-150 (M)

MDA-150 (M)

State: In stock
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Warranty: No warranty infomation


Price: Contact us




Order
  • Delivery time: 8h00 - 18h00 daily
  • Genuine product, provided width CO, CQ
  • 03 months of free warranty for consumable and accessories
  • 12 months of free warranty for main equipment
  • Accessorie's price is applied only when purchased with
    main equipment
  • Contact us for any particular accessory's quotion
Email: info@redstarvietnam.com Every day in week

 

Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes

 

Type Manual (Mask Aligner)
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 500W, 1kW & Digital power supply
Uniform beam size 6.25" x 6.25
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~50mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (motorized)
Options CCD BSA
  • Đánh giá sản phẩm:

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