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MDA-12SA
Red Star Vietnam Co., Ltd.
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MDA-12SA

MDA-12SA

State: In stock
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Warranty: No warranty infomation


Price: Contact us




Order
  • Delivery time: 8h00 - 18h00 daily
  • Genuine product, provided width CO, CQ
  • 03 months of free warranty for consumable and accessories
  • 12 months of free warranty for main equipment
  • Accessorie's price is applied only when purchased with
    main equipment
  • Contact us for any particular accessory's quotion
Email: info@redstarvietnam.com Every day in week

 

  • Easy operation UI
  • PC Operation with PLC control
  • Image grab & Data log
  • More than 100 Program recipes
  • Motorized joystick control
  • Microscope position control system
  • Enable Ceramic substrate for Bump

 

Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 13" x 13"
Substrate size piece to 12" x 12"
UV lamp & Power 2kW & power supply
5kW & Power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Frame Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.
  • Đánh giá sản phẩm:

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