LineBeam

State: In stock

System for excimer laser crystallization annealing applications.

LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is progressing to even longer line beams for annealing larger areas, employing new excimer lasers with more and more pulse energy.

Warranty: No warranty infomation

Price: Contact us

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Delivery time: 8h00 - 18h00 daily
Genuine product, provided width CO, CQ
03 months of free warranty for consumable and accessories
12 months of free warranty for main equipment
Accessorie's price is applied only when purchased with
main equipment
Contact us for any particular accessory's quotion

Email: info@redstarvietnam.com Every day in week

Features
Specifications
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Comments

LineBeam Key Features

Excellent Beam Profile Homogeneity

Outstanding Optics Lifetime

Display Industry Proven Technology; Large Installation Base Worldwide

Standard Technology for Silicon Annealing Process (LTPS-LCD, OLED)

Accessories for LineBeam

Micro Smoothing Device

Short Axis Fine Tuner

Beam Profiler

Pulse Expander Module

Beam Stabilization Unit

Beam Symmetry Generator

Short Axis Online Monitor

CB E-Sigma Monitor

P-Lens Entrance Monitor

SB E-Sigma Monitor

LineBeam Model	LineBeam 465	LineBeam 750	LineBeam 1000	LineBeam 1300
Wavelength (nm)	308	308	308	308
Laser Pulse Energy (mJ)	1050	2000	4000	4000
Max. Repetition Rate (Hz)	600	600	600	600
Energy Density (mJ/cm²)	350	430	435	435
Line Beam Length (mm)	465	750	1000	1300
Line Beam Width (µm)	350	400	580	450
Long Axis Homogeneity (%, 2 sigma)	1.8	1.8	1.8	1.8
Short Axis Steepness (µm)	125	125	125	125
Depth of Focus (µm)	±150	±150	±120	±120

UV Processing Solutions	Wavelength (nm)	Beam Geometry	Approx. Beam Dimensions	Approx. Energy Density	Laser Options
UVblade	308	Line	(250-750 mm) x 0.3 mm	0.3 J/cm²	LEAP, LAMBDA SX
LineBeam	308	Line	(750 - 1300 mm) x 0.4 mm	0.4J/cm²	VYPER, TwinVYPER
VarioLas	193, 248, 308	Line or Rectangular	50 mm x 0.6 mm or 2 mm x 2 mm	0.2-5 J/cm²	COMPexPro, LPXpro
GeoLasPro	193	Round Spot	4-160 µm	1-45 J/cm²	COMPexPro