| Detecting range | 200 – 5,000 nm |
| System resolution | 0.045nm @1200gr/mm grating/ CCD resolution -0.08 nm @1800gr/mm grating |
| Spatial resolution | 1um/( other resolution available on request) |
| Spectrograph | Aberration corrected high throughput 1024x256 pixel format 95% QE, - 100 degrees celcius TE cooling (max.) Dark current : 0.0005e-/pixel/sec |
| Detector | TE cooled high performance CCD/PMT /Phtodiode |
| Laser power contro | 0.1% ~ 100 % ( up to 6 different power level and other level available on request) |
| Laser excitation | Deep UV ~ NIR ( up to 3 different source available) |
| Sample stage | XY Scanning stage Travel range : 76 mm x52 mm Repeatability : < 1 um Resolution( min.) : 0.05 um(min.) 0.1 um(typical) |
| Vision system | For Sample Image & Input beam position monitoring Max. 1600x digital image CCD camera with IEEE 1394 interface |
| Automation(on request) | Software controlled laser rejection filter and Variable ND filter set to adjust input beam power Step motor scanning turret |
| Objective lens | Spectral range : 200 – 1700 nm 10X, 50X & 100X Plan lenses |
| Beam spot size |
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