● Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is minimised.
Unlike conventional oil diffusion pumped SEM, it does not require large heating capacity or water re-circulator, making it an energy saving ecological SEM.
● To assist inexperienced users the SU1510 includes an on-screen operation guide that walks the user step by step through the complete imaging process - from vacuum mode
selection to image capture. This unique feature allows users of all experience levels to quickly obtain high quality images.
● The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron resolution of 3.0 nm (high vacuum mode) and a guaranteed backscattered
electron resolution of 4.0 nm (variable pressure mode).
● For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode that eliminates negative charging, and provides the optimum conditions for both imaging
and EDX microanalysis(*1).
● The specimen chamber and stage have been designed to accommodate samples as large as 153 mm in diameter. Simultaneous EDX microanalysis and imaging can be completed
on a sample that is up to 60mm in height at the analytical working distance of 15 mm.
● The ESED-II*2 is optionally available if secondary electron imaging in variable pressure mode is desired. This detector is integrated into the GUI of the SU1510 and is completely
software driven with all automatic features ready for instant use by the operator.
|
Items |
Description |
|
|
Resolution SE |
3.0 nm at 30 kV (High Vacuum Mode) |
|
|
Resolution BSE |
4.0 nm at 30 kV (Variable Pressure Mode) |
|
|
Magnification |
×5 to ×300,000 |
|
|
Accelerating Voltage |
0.3 to 30 kV |
|
|
Low vacuum Range |
6 to 270 Pa through graphic menu |
|
|
Image Shift |
±50 µm (WD=15 mm) |
|
|
Maximum Specimen Size |
153 mm in diameter |
|
|
Specimen Stage |
X |
0 to 80 mm |
|
Y |
0 to 40 mm |
|
|
Z |
5 to 50 mm |
|
|
R |
360° |
|
|
T |
-20° to 90° |
|
|
Observable area |
126 mm in diameter (with rotation) |
|
|
Maximum Height |
60 mm (WD=15 mm) |
|
|
Electron Optics |
Electron Gun |
Precentered Cartridge Filament |
|
Objective Aperture |
5-position, click stop objective aperture |
|
|
Gun Bias |
Quad bias with variable bias control |
|
|
Detectors |
Secondary Electron Detector |
|
|
High Sensitivity Semiconductor BSE Detector |
||
|
Analytical Position |
WD = 15mm, TOA = 35° |
|
|
Display |
OS |
Windows® XP (subject to change without notice) |
|
Controls |
Mouse, Keyboard |
|
|
Monitor |
19 type LCD (subject to change without notice) |
|
|
Auto Alignment |
Auto Beam Setting, Auto Axial Alignment |
|
|
Auto Image Adjustment |
Auto Focus, Auto Stigmator/Focus |
|
|
Auto Brightness & Contrast |
||
|
Image Data Saving |
640 × 480 pixels, 1,280 × 960 pixels |
|
|
2,560 × 1,920 pixels, 5,120 × 3,840 pixels |
||
|
Image Filing |
Search Functions / Built-in Image Data Base with Image Processing Functions |
|
|
Filing Format |
BMP, TIFF, JPEG |
|
|
Auto Data Display |
Accelerating Voltage, Magnification, Micron Marker, Unit, Working Distance,Date/Time, Detector, Pressure |
|
|
Image Display Mode |
Full Screen Display : 1,280 × 960 pixels |
|
|
Small Screen Display : 640 × 480 pixels |
||
|
Dual Image Display : 640 × 480 pixels ×2 |
||
|
Signal Mixing |
||
|
Evacuation System |
Operation |
Full Automatic Sequence |
|
Turbo molecular pump |
210 L/s × 1 |
|
|
Oil Rotary Pump |
135 L/min (162 L/min. with 60 Hz) × 1 |
|
|
Protection |
Power Failure and Vacuum Failure |
|
|
Auxiliary Functions |
Raster Rotation |
|
|
Dynamic Focus/Tilt Compensation |
||
|
Dynamic Stigma Monitor |
||
|
Free Layout Print Function |
||
|
3D Animation Maintenance Guide |
||
|
Operation Guide |
||
|
Easy Measurement |
||
|
Oblique image |
||
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