● The extra large chamber can accommodate a maximum 300mm diameter sample and EDX/WDX/EBSD accessories simultaneously. It also accommodates a tall sample up to 110mm.
● 5-axis motorized stage with eucentric tilt and rotation, image navigation system, stage history, stage memory and click to center.
● User-friendly GUI design that is consistent with the S-4800, SU-70 & the S-3400N to allow operators to easily migrate from tool to tool with minimum training.
● The display system allows a full-frame, flicker free, high pixel density and real-time image. It also allows simultaneous display of images from two
different detectors, each having different sample information, in real-time, including signal mixing.
● VP mode for observation of non-conductive samples without the need for metal coating.
● High sensitivity semiconductor BSE detector, that operates at a rapid scan mode. This makes finding areas of interest on large samples easy and convenient.
● Turbo Molecular Pump (TMP) is standard. This minimizes sample contamination due to its clean and dry vacuum conditions.
Unlike conventional diffusion pumped SEM, it does not require large heating power or water re-circulator, making it an energy saving ecological SEM.
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Items |
Description |
|
|
Resolution |
SE |
3.0 nm at 30 kV (High vacuum mode) |
|
10 nm at 3 kV (High vacuum mode) |
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|
BSE |
4.0 nm at 30 kV (Low vacuum mode) |
|
|
Magnification |
×5 - ×300,000 |
|
|
Accelerating voltage |
0.3 - 30 kV |
|
|
Low vacuum range |
6 - 270 Pa through graphic menu |
|
|
Image shift |
±50 µm (WD= 10 mm) |
|
|
Maximum specimen size |
300 mm in diameter |
|
|
Specimen stage |
X |
150 mm |
|
Y |
110 mm |
|
|
Z |
5 - 65 mm |
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|
R |
360° |
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|
T |
-20° - 90° |
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|
Observable area |
203 mm in diameter (with rotation) |
|
|
Maximum height |
110 mm (WD= 10 mm) |
|
|
Stage control |
Computer eucentric 5-axis motorization |
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|
Electron optics |
Electron gun |
Precentered cartridge filament |
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Objective aperture |
5-position, click stop objective aperture |
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|
Gun bias |
Quad bias with variable bias control |
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|
Detectors |
Everhart thornley secondary electron detector |
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|
High sensitivity semiconductor BSE detector, five segments, fully selectable |
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|
Analytical position |
WD = 10 mm, TOA = 35° |
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|
Display |
Controls |
Joystick, keyboard and rotary knob set |
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Monitor |
19.1 LCD flat panel monitor (subject to change without notice) |
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|
Auto alignment |
Auto beam setting, Auto axial alignment |
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|
Auto image adjustment |
Auto focus, auto stigmator/focus, Auto brightness & contrast |
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|
Image data saving |
640 × 480 pixels, 1,280 × 960 pixels |
|
|
2,560 × 1,920 pixels, 5,120 × 3,840 pixels |
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|
Filing format |
BMP, TIFF, JPEG |
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|
Image display mode |
Full screen display: 1,280 × 960 pixels |
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|
Small screen display: 640 × 480 pixels |
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|
Dual image display: 640 × 480 pixels × 2 |
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|
Signal Mixing |
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|
Evacuation system |
Operation |
Full automatic sequence |
|
Turbo molecular pump |
210L/sec. × 1 |
|
|
Rotary pump |
135 L/min. (162 L/min. with 60 Hz) × 1 |
|
|
Protection |
Power failure and vacuum failure |
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Auxiliary functions |
Raster rotation, dynamic stigma-monitor |
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|
Dynamic focus/tilt compensation |
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|
Free layout print function, alphanumeric function |
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|
3D animation maintenance guide |
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|
Navigation, Easy measurement, Oblique image |
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