● Revolutionary automatic alignment functions (Auto Beam Setting, Auto Aperture Alignment, etc.)
● Better resolution of 10 nm at 3 kV
● Real time full screen image, dual image and signal mixing
● Newly developed high sensitivity solid state type BSE detector
● Computer eucentric, 5-axes motorized stage with -20/+90 degrees tilt (Type II)
● Can accommodate samples as tall as 80 mm for elemental analysis(Type II)
● Analytical specimen chamber with optimum geometry for simultaneous accommodation of EDS, WDS and EBSD
● High throughput, less floor space, less electric power consumption, with no cooling water requirement due to TMP evacuation system
S-3400N TYPE I
|
S-3400N TYPE II
|
Items |
Description |
||
Resolution |
SE |
3.0 nm at 30 kV (High Vacuum Mode) |
|
10 nm at 3 kV (High Vacuum Mode) |
|||
BSE |
4.0 nm at 30 kV (Low Vacuum Mode) |
||
Magnification |
×5 - ×300,000 |
||
Accelerating Voltage |
0.3 - 30 kV |
||
Low Vacuum Range |
6 - 270 Pa through graphic menu |
||
Image Shift |
±50 µm at WD = 10 mm |
||
Maximum Specimen Size |
200 mm in diameter |
||
Specimen Stage |
|
TypeI |
TypeII |
X |
0 - 80 mm |
0 - 100 mm |
|
Y |
0 - 40 mm |
0 - 50 mm |
|
Z |
5 - 35 mm |
5 - 65 mm |
|
R |
360° |
360° |
|
T |
-20 - 90° |
-20 - 90° |
|
Maximum Height |
35 mm at WD = 10 mm |
80 mm at WD = 10 mm |
|
Observable area |
105 mm in diameter |
130 mm in diameter |
|
Mortorized |
manual |
5 axes in standard |
|
Electron Optics |
Electron Gun |
Precentered Cartridge Filament |
|
Objective Aperture |
Click Stop Movable Aperture with 4 openings |
||
Gun Bias |
Quadrant Bias |
||
Detectors |
Secondary Electron Detector High Sensitivity Semiconductor BSE Detector |
||
Analytical Position |
WD = 10 mm, TOA = 35° |
||
Display |
Language |
English |
|
OS |
Windows®XP |
||
Controls |
Mouse, Keyboard and Rotary Knob Set |
||
Monitor |
19 type LCD(to be changed without notice) |
||
Auto Alignment |
Auto Beam Setting, Auto Axial Alignment |
||
Auto Image Adjustment |
Auto Focus, Auto Stigmator/Focus Auto Brightness & Contrast |
||
Image Data Saving |
640 × 480 pixels, 1,280 × 960 pixels, 2,560 × 1,920 pixels, 5,120 × 3,840 pixels |
||
Image Filing |
Search Functions/Built-in Image Data Base with Image Processing Functions |
||
Filing Format |
BMP, TIFF, JPEG |
||
Auto Data Display |
Accelerating Voltage, Magnification, Micron Marker, Unit, Film Number, Working Distance, Date/Time, Detector, Pressure |
||
Image Display Mode |
Full Screen Display: 1,280 × 960 pixels |
||
Evacuation System |
Operation |
Full Automatic Sequence |
|
Turbo Molecular Pump |
210 L/Sec. × 1 |
||
Oil Rotary Pump |
135 L/Min.(162 L/Min.with 60 Hz) × 1 |
||
Protection |
Power Failure and Vacuum Failure |
||
Auxiliary Functions |
Raster Rotation |
||
Dynamic Focus/Tilt Compensation |
|||
Dynamic Stigmonitor |
|||
Free Layout Print Function |
|||
3D Animation Maintenance Guide |
|||
Easy Measurement |
|||
Oblique image |
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