Carmar’s SWIM full series designs with the latest scanning white-light interferometric technology.Outstanding performance with simple operation, customer design flexibility and high-precision scanning,the Micro-3D profile and surface texture can be done by non-contact and non- constructive operation innormal environment. Moreover, nano-level surface roughness and step height calculation are traced toISO International standards.
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Model
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SWIM-1510MS
SWIM-1510ME
SWIM-1510MZ
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SWIM-2515MS
SWIM-2515ME
SWIM-2515MZ
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SWIM-4030MS
SWIM-4030ME
SWIM-4030MZ
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Travel range ofstage (mm)
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150 x 100
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250 x 150
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400 x 300
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Size of machine X/Y/Z (mm)
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510 x 560 x 900
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570 x 670 x900
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700 x 990 x 900
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Weight (kg)
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145
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150
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296
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Loading
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10 kg
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Travel range in Z axis
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80 mm，Manual coarse／fine adjustment
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Digital position display unit
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Linear optical scales and computer display in XYZ ( 0.5 mm resolution)
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Tilt adjustment stage
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Two way ／Manual
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Base
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Granite
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Height Measurement
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Scanning Range
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100 mm ( 400 mm, optional)
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Resolution
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0.1 nm
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Repeatibility (σ)
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≦ 0.1 % ( Range： > 10 m m)
≦ 10 nm ( Range：1 m m ~ 10 m m)
≦ 5 nm ( Range： <1 m m )
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Control mode
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Auto
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Scanning speed (mm ／s)
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12 （Max.）
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Light Source
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Type
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Halgon
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Average life time
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1000 hours (100W) ; 500 hours (150W)
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Light intensity adjustment
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Auto ／Manual
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Data processing Computer
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CPU
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Dual-core Intel CPU or higher
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Display Unit
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Two 17” LCD
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Data storage device
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200 GB Hard Driver or Higher
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Operation system
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WindowsXP (2)
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Power and Environment Requirements
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Power
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AC110V 50Hz ／60Hz or AC220V 50Hz ／60Hz
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Environment vibration
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Higher than VC-C class
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Measuring and Analyze Software
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Measuring software
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ImgScan pre-processing softwar ：
With VSI／PVSI／PSI measurement mode (PSI need more optional module)
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Analyze software
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PostTopo post-processing software：
ISO roughness/step height; FFT filtering; 2D ／3D Observation; Size／Area／Volume Measuring; Zoom in; Image Output; Report Output; Measure by teaching procedure, etc.
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Model
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SWIM-1510MS／SWIM-1510ME
SWIM-2515MS／SWIM-1510ME
SWIM-4030MS／SWIM-4030ME
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Objectives Magnification
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10X
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20X
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50X
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Field of View
(Length X Width)
Unit: mm
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MS
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0.43 X 0.32
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0.21 X 0.16
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0.088 X 0.066
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ME
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1.67 X 1.33
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0.84 X 0.67
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0.34 X 0.27
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Optical resolution (mm)
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0.92
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0.69
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0.5
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Convergent Angle (Degrees)
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17
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23
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33
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Working distance (mm)
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7.4
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4.7
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3.4
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Imaging Unit
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High speed B/W CCD Camera
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Imaging Unit Resolution
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MS
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640 x 480 pixels
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ME
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1280 x 1024 pixels
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Model
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SWIM-1510MZ
SWIM-2515MZ
SWIM-4030MZ
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Objectives Magnification
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10X
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20X
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50X
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Zoom (Manula)
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0.5X ／ 1X ／ 1.5X ／ 2X
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Field of View
(Length X Width)
Unit: mm
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Max
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0.21 X 0.16
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0.10 X 0.079
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0.042 X 0.031
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Min
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0.86 X 0.64
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0.42 X 0.32
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0.17 X 0.13
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Optical resolution (mm)
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0.92
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0.69
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0.5
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Convergent Angle (Degrees)
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17
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23
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33
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Working distance (mm)
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7.4
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4.7
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3.4
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Imaging Unit
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High speed B/W CCD Camera
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Imaging Unit Resolution
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640 x 480 pixels
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Model
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3D VMM-6060C
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Travel range of stage(mm)
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600 x 600 |
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Size of machine X/Y/Z (mm)
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1500 x 1300 x 1510
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Weight (kg)
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1300
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Travel range in Z axis
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80 mm
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Digital position display unit
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Linear optical scales and computer display in XYZ ( 0.5 mm resolution)
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X／Y Erroes
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(3 + L/200) um L = measuring length (unit︰mm)
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Base／Vibration isolation
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Granite／Passive Isolation Feet
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Photoelectric system
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Refer to SWIM-MS model
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Height measuring range
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100 mm ( 400 mm, optional)
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3D Height resolution
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0.1 nm
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3D Height repeatibility (σ)
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≦ 0.1 % ( Range： > 10 m m)
≦ 10 nm ( Range：1 m m ~ 10 m m)
≦ 5 nm ( Range： <1 m m )
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3D Scanning speed
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12 mm ／s （Max.）
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Light source
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LED light source
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Light intensity control
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Manual／Auto
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CPU ／Operation system
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Dual-core Intel CPU or higher ／WindowsXP
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Monitor／Storage device
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Two 17” LCD／ 200 GB Hard Driver or higher
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Power
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AC110V ／220V ，50Hz ／ 60Hz
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Environment vibration
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VC-C class or higher
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Temperature ／ Humidity
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Temperature：20 ± 2 ℃ Humidity：55 ~ 65 % RH
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Working air requirements
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Pressure： 0.4 MPa Flow rate：120 L/min
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Metrology software
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3D QIM 5008 ／ ImgScan ／ PostTopo
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