Our SCM mode provides doping concentration information over the sample surface
by measuring the capacitance change between tip and sample. the module enables
a variable resonator frequency, which allows a wide RF bandwidth capable of monitoring
a large range of doping concentrations by selecting the most sensitive frequency of the
resonator for a specific doping range.
The n-doped silicon sample has areas of varying dopant concentration, imaged by Park SCM. |
N-doped silicon
Scan size: 20 µm
Using Probe: PPP-EFM
Imaged on a Park NX20 using SCM Mode.
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