Easy and intuitive operation for data acquisition, reporting, and everything in between
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Cutting-edge electron optics for high-image resolution and quality
Sample: cement 5 kV UVD
Compact and efficient design allows installation almost anywhere
Equipped with an oil-free vacuum pump and a replaceable cartridge filament for easy maintenance.
Item | TM4000Plus | TM4000 |
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Magnification | ×10~×100,000 (Photographic magnification) ×25~×250,000 (Monitor display magnification) |
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Accelerating voltage | 5 kV, 10 kV, 15 kV | |
Image signal | Backscattered electrons (BSE) Secondary electrons (SE) Mix (Backscattered electrons + Secondary electrons) |
Backscattered electrons (BSE) |
Vacuum mode | BSE: Conductor/Standard/Charge-up reduction SE: Standard/Charge-up reductionMix: Standard/Charge-up reduction |
BSE: Standard/Charge-up reduction |
Image mode(BSE) | COMPO/Shadow 1/Shadow 2/TOPO | |
Sample stage traverse | X: 40 mm Y: 35 mm | |
Maximum sample size | 80 mm (in diameter) , 50 mm (in thickness) | |
Electron gun | Pre-centered cartridge tungsten filament | |
Signal detection system | BSE: High-Sensitivity 4-segment BSE detector SE: High-Sensitivity Low-Vacuum SE detector |
BSE: High-Sensitivity 4-segment BSE detector |
Auto image adjustment function | Auto start, Auto focus, Auto brightness/contrast | |
Save image size | 2,560 × 1,920 pixels, 1,280 × 960 pixels, 640 × 480 pixels | |
Image format | BMP, TIFF, JPEG | |
Data display | Micron marker, micron value, magnification, date and time, image number and comments, WD (Working Distance), accelerating voltage, observation conditions, observation mode, image mode, detection signals | |
Evacuation system (vacuum pump) |
Turbo molecular pump: 67 L/s x 1 unit Diaphragm pump: 20 L/min |
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Operation help functions | Raster rotation, Magnification presets (3 steps), Image shift (±50 µm @WD 6.0 mm) | |
Safety functions | Over-current protection function, built-in ELCB | |
Size / weight | Main unit: 330 (width) × 614 (depth) × 547 (height) mm, 52 kg (motorized stage) 330 (width) × 617 (depth) × 547 (height) mm, 52 kg (munual stage) Diaphragm pump : 144(width) × 270 (depth) × 216 (height) mm |
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