Res. ML |
50mm |
100mm |
150mm |
200mm |
250mm |
300mm |
350mm |
0.005mm |
LS50-0050 |
LS50-0100 |
LS50-0150 |
LS50-0200 |
LS50-0250 |
LS50-0300 |
LS50-0350 |
0.001mm |
LS10-0050 |
LS10-0100 |
LS10-0150 |
LS10-0200 |
LS10-0250 |
LS10-0300 |
LS10-0350 |
Res. ML |
400mm |
450mm |
500mm |
600mm |
700mm |
800mm |
900mm |
0.005mm |
LS50-0400 |
LS50-0450 |
LS50-0500 |
LS50-0600 |
LS50-0700 |
LS50-0800 |
LS50-0900 |
0.001mm |
LS10-0400 |
LS10-0450 |
LS10-0500 |
LS10-0600 |
LS10-0700 |
LS10-0800 |
LS10-0900 |
Res. ML |
1,000mm |
|
|
|
|
|
|
0.005mm |
LS50-1000 |
|
|
|
|
|
|
0.001mm |
LS10-1000 |
|
|
|
|
|
|
Grating pitch |
20 µm |
Resolution |
0.005 mm, 0.001 mm, 0.0005 mm (option) |
Measuring length (ML) |
50 mm - 1,000mm |
Output signal |
TTL square wave (std.) ; RS422 (option) |
Accuracy |
± ( 5 + L/200 ) µm ; L: measuring length (mm) |
Max. Response Speed |
60 m/min (1 µm resolution) |
Signal Cable |
3.5 m |
Working temperature |
0℃~ +40℃ |
Storage temperature |
-20℃~ +50℃ |
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