FilmTek SE
Spectroscopic ellipsometer with rotating compensator design for accurate thin film characterization
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FilmTek SE
The base model of our “SE” product line, the FilmTek™ SE automated benchtop spectroscopic ellipsometer offers users a streamlined option for quickly and easily collecting highly precise, repeatable measurements on a range of thin and ultra-thin film samples.
The FilmTek SE is a benchtop spectroscopic ellipsometer for single point measurements and can be configured with a manual or automated xy stage. At the click of a button, thousands of wavelengths are simultaneously collected in seconds, and the integrated auto-focus feature eliminates the tedious task of manual sample alignment required by comparable ellipsometers. Our film modeling software and in-house dispersion formula allow for easy data processing, giving accurate and precise real-time results.
Measurement Capabilities
Enables simultaneous determination of:
- Multiple layer thicknesses
- Indices of refraction [ n(λ) ]
- Extinction (absorption) coefficients [ k(λ) ]
- Energy band gap [ Eg ]
System Components
Standard:
- Spectroscopic ellipsometry with rotating compensator design (390nm-950nm)
- Automated stage with autofocus
- Ideal for measuring ultra-thin films (0.03 Å repeatability on native oxide)
- Affordable for nearly any budget
- Advanced material modeling software
- Bruker’s generalized material model with advanced global optimization algorithms
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