FilmTek 4000
Muti-angle reflectometry with automated wafer mapping for silicon photonics and planar waveguide applications
Liên hệ
FilmTek 4000
The FilmTek™ 4000 is optimized for high resolution measurement of refractive index required for silicon photonics and waveguide applications. Utilizing multi-angle reflectometry and patented multi-angle Differential Power Spectral Density analysis capability, the FilmTek 4000 delivers unmatched measurement accuracy for refractive index. Measurement resolution is optimized through independent thickness and index (TE and TM modes) measurements, with index measurement resolution up to 2×10-5. This provides a 100x performance advantage over the best non-contact method and 10x that of the best prism coupler contact systems. When equipped with optional spectroscopic ellipsometry, the tool can also measure very thin films.
Measurement Capabilities
Enables simultaneous determination of:
- Multiple layer thicknesses from 0Å to 250µm (with SE option)
- Optical properties from 400nm-1700nm
- TE and TM indices of refraction [ n(λ) ]
- Extinction (absorption) coefficients [ k(λ) ]
- Energy band gap [ Eg ]
- Constituent, void fraction
System Components
Standard:
- Multi-angle, polarized spectroscopic reflection (400nm-1700nm)
- Patented Multi-Angle Differential Power Spectral Density (MADP) analysis
- Patented Differential Power Spectral Density (DPSD) processing
- Measures film thickness and index of refraction independently
- 2×10-5 refractive index resolution
- Whole wafer measurement
- Automated stage with autofocus
- Automated beam alignment
- Camera for imaging measurement location
- Advanced material modeling software
- Bruker’s generalized material model with advanced global optimization algorithms
Optional:
- Spectroscopic ellipsometry with rotating compensator design
- Hot plate for characterization of refractive index and thermal expansion as a function of temperature
- Cassette to cassette wafer handling
- FOUP and SMIF compatible
- Pattern recognition (Cognex)
- SECS/GEM
Related products
Liên hệ
Liên hệ
Liên hệ
Liên hệ
Liên hệ
Liên hệ
Liên hệ
Liên hệ
Thiết bị Y tế