- Better than 5 meV energy resolution
- High brightness cold field emission gun (CFEG)
- Dispersing-undispersing monochromator
- Open-source Python-powered control software
- UHV construction
- Ultra-stable Electron Energy Loss Spectroscopy (EELS) with direct-detection option
S(q, w) diagram of phonon dispersion curves in hexagonal Boron Nitride at two different temperatures (parallel acquisition)
Nion HERMES Specifications
| Feature | Benefit |
| < 5 meV energy resolution at 30 kV (< 6 meV at 60 kV) | Resolve fine differences in EELS spectral edges |
| Large energy range of up to 2 keV at 200 kV | Collect all elements in one EELS spectrum |
| Correction of all fifth-order axial aberrations | Larger probe angles, higher beam current |
| Every operation can be performed remotely | Remote operation with no local assistance |
| Friction-free, centro-symmetric sample stage | Ultra-precise sample motion, freedom from drift |
| Double tilt sample holder using ball bearings | Backlash-free, ultra-precise tilting |
| Fast electrostatic beam blanker | Avoids sample damage when not collecting data |
| 5th-order-corrected EELS optics | >50 mr acceptance semi-angles, more efficient analysis |
| Microscope column is entirely ion-pumped | Minimizes sample contamination and etching |
| Column uses only metal vacuum seals | Sample vacuum typically <1×10-9 torr |
| Whole column bakeable to 140°C | Minimizes sensitivity to stray AC fields |
| Double μ-metal shielding of entire column | Column can be reconfigured after installation |
| Self-diagnosing electronics | Rapid remote servicing |
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