Still Driving Stylus Profiling Innovation 55+ Years Later
Over the last five decades, Bruker’s Dektak systems have led the industry in stylus profiling technology, achieving milestone improvements in resolution, stability, speed, and versatility. Now, Dektak systems are well-established as the gold standard of stylus profilers; when an accurate, trustworthy stylus profiler is needed, Dektak has long been the unquestioned solution.
Dektak Pro takes the next step forward in stylus profiling innovation, providing even more enhanced operability, reliability, and measurement accuracy to enhance and extend the qualities that make Dektak synonymous with stylus profiling.
Maximizing Repeatability and Accuracy
Dektak Pro delivers accurate, precise data with the highest resolution, lowest noise floor, and easiest tip exchange of any commercially available stylus profilometer. State-of-the art measurement and analysis technology maximizes repeatability and accuracy, making single-nanometer step height measurements and better than 4 Å repeatability possible.
Dektak Pro reliably provides unbeatable performance
Enhancing Throughput
Every step of the measurement and analysis process is accelerated with Dektak Pro. Direct-drive scan stage technology reduces time between scans, and 64-bit parallel processing in the Vision64® software enables fast data processing.
Additional speed and ease-of-use technological advancements in Dektak Pro:
- A new algorithm brings nearly the entire field of view into focus in the optical live image, making it easier to locate features of interest.
- New step height algorithms automate analysis routines, improve consistency, and minimize potential user error in step height calculations.
Previous-Generation Dektak
Dektak Pro
Providing Ultimate Versatility and Ease of Use
Suited to widely diverse applications
Dektak Pro addresses R&D, process development, and QA/QC present and future needs across a host of industrial and research applications, such as:
- Microelectronics
- Thick film coatings
- Biomaterials
1 μm step at 0.03 mg and 1 mm step at 15 mg, both measured using a single sensor on Dektak Pro.
Accurate and responsive in dynamic measurement scenarios
With Dektak Pro, one measurement head covers 5 nm–1 mm step heights and 0.03–15 mg loads (with N-Lite+ option) without recalibration. The low-inertia sensor (LIS 3) rapidly adapts to sudden changes in surface topography and maintains accuracy and responsiveness in dynamic measurement scenarios
Fast and easy stylus replacement
Dektak Pro’s unique self-aligning stylus assembly facilitates quick and easy stylus exchange while eliminating any potential mishaps during the process. Bruker offers the widest range of stylus sizes to accommodate nearly any application requirement.
Dektak Pro features the fastest and easiest tip exchange, making tip switching simple to address the widest range of applications.
Selecting the Configuration that Best Matches Your Application and Budget
Dektak Pro comes in several standard configurations with different stage sizes — up to 200 mm of full-sample access for wafers — and automated stage options to fit your unique needs and budget.
- Dektak Pro E or -S: Manual 100 mm XY stage with or without manual theta rotation
- Dektak Pro A: Automated 150 mm XY stage with automated 360° theta
- Dektak Pro A200: Automated encoded 200 mm XY stage with fine encoded automated 360° theta
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